System for illumination of an EUV-nanolithograph mask

Author: Zuev S.   Pestov A.   Polkovnikov V.   Salashchenko N.   Skryl' A.   Strulya I.   Toropov M.   Chkhalo N.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 1027-4510

Source: Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques, Vol.5, Iss.3, 2011-06, pp. : 517-519

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract