Pulsed nanosecond annealing of magnesium-implanted silicon

Author： Galkin N.   Vavanova S.   Galkin K.   Batalov R.   Bayazitov R.   Nuzhdin V.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 1063-7842

Source： Technical Physics, Vol.58, Iss.1, 2013-01, pp. : 94-99

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