Synthesis of crystallized TaON and Ta 3 N 5 by nitridation of Ta 2 O 5 thin films grown by pulsed laser deposition

Author: Kerlau M.   Merdrignac-Conanec O.   Guilloux-Viry M.   Perrin A.  

Publisher: Elsevier

ISSN: 1293-2558

Source: Solid State Sciences, Vol.6, Iss.1, 2004-01, pp. : 101-107

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Abstract