Surface metallic state of aluminum-nitride (AlN) thin films prepared by direct current (DC)-reactive magnetron sputtering: optical spectroscopic analysis with incoherent light

Author： Rakov N.   Mahmood A.   Xiao M.  

Publisher： Elsevier

ISSN： 1359-6462

Source： Scripta Materialia, Vol.50, Iss.5, 2004-03, pp. : 589-592

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