Author： Bugrov G.E. Kondranin S.K. Kralkina E.A. Pavlov V.B. Savinov D.V. Vavilin K.V. Lee H.-J.
Publisher： Elsevier
ISSN： 1567-1739
Source： Current Applied Physics, Vol.3, Iss.6, 2003-12, pp. : 485-489
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Related content
Plasma ion source with hollow cathode
By Latuszynski A. Drozdziel A. Pyszniak K. Dupak J. Maczka D. Meldizon J.
Vacuum, Vol. 70, Iss. 2, 2003-03 ,pp. :
Access to resources
Recommend
Cathode potential of RGA and outgassing from vacuum wall around the ion source
By Kurokouchi S. Watanabe S. Kato S.
Vacuum, Vol. 47, Iss. 6, 1996-06 ,pp. :
Microtips cathode for ignition of cold cathode gauges
Vacuum, Vol. 48, Iss. 11, 1997-11 ,pp. :
Surface analysis of contamination layers in cold-cathode gauges
By Schindler N.
Applied Physics A, Vol. 78, Iss. 5, 2004-03 ,pp. :