Plasma ion source with hollow cathode

Author: Latuszynski A.   Drozdziel A.   Pyszniak K.   Dupak J.   Maczka D.   Meldizon J.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.70, Iss.2, 2003-03, pp. : 451-455

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Abstract