Investigation of flow mechanisms in semiconductor wafer fabrication

Author: Kim S.  

Publisher: Taylor & Francis Ltd

ISSN: 0020-7543

Source: International Journal of Production Research, Vol.41, Iss.4, 2003-01, pp. : 681-698

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract