Effects of gas temperature on optical and transport properties of a-Si:H films deposited by PECVD

Author: Liao N. -M.  

Publisher: Taylor & Francis Ltd

ISSN: 1478-6443

Source: Philosophical Magazine, Vol.88, Iss.25, 2008-09, pp. : 3051-3057

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

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Abstract