Crystallization kinetics of amorphous silicon carbide derived from polymeric precursors

By Kurtenbach D.   Mitchell B.S.   Zhang H.   Ade M.   Muller E.  

Thermochimica Acta, Vol. 337, Iss. 1, 1999-10 ,pp. : 155-161

Elsevier

Access to resources Recommend Favorite

Concentration and thermal release of hydrogen in amorphous silicon carbide films prepared by rf sputtering

By Suzaki Y.   Shikama T.   Yoshioka S.   Yoshii K.   Yasutake K.  

Thin Solid Films, Vol. 311, Iss. 1, 1997-12 ,pp. : 207-211

Elsevier

Access to resources Recommend Favorite

Alternative phosphorus-doped amorphous silicon using trimethylphosphine diluted in hydrogen

By Terasa R.   Albert M.   Bartha J.W.   Roessler T.   Abramov A.S.   Kosarev A.I.   Kuduyarova V.K.   Vinogradov A.  

Thin Solid Films, Vol. 427, Iss. 1, 2003-03 ,pp. : 270-273

Elsevier

Access to resources Recommend Favorite

Structural properties of amorphous silicon prepared from hydrogen-diluted silane

By Zeman M.  

Philosophical Magazine, Vol. 89, Iss. 28-30, 2009-10 ,pp. : 2435-2448

Taylor & Francis Ltd

Access to resources Recommend Favorite

Properties of amorphous silicon carbide films prepared by PECVD

By Huran J.   Hrubcin L.   Kobzev A.P.   Liday J.  

Vacuum, Vol. 47, Iss. 10, 1996-10 ,pp. : 1223-1225

Elsevier

Access to resources Recommend Favorite