![](/images/ico/ico_close.png)
![](/images/ico/ico5.png)
Author: Astrova E.V. Belov S.V. Lebedev A.A. Remenjuk A.D. Rud Y.V.
Publisher: Elsevier
ISSN: 0040-6090
Source: Thin Solid Films, Vol.255, Iss.1, 1995-01, pp. : 196-199
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
![](/images/ico/ico_close.png)
![](/images/ico/ico5.png)
![](/images/ico/ico_close.png)
![](/images/ico/ico5.png)
Optical and electrical properties of LPCVD silicon oxynitride films on silicon
By Szekeres A. Alexandrova S. Modreanu M. Cosmin P. Gartner M.
Vacuum, Vol. 61, Iss. 2, 2001-05 ,pp. :
![](/images/ico/ico_close.png)
![](/images/ico/ico5.png)
![](/images/ico/ico_close.png)
![](/images/ico/ico5.png)
![](/images/ico/ico_close.png)
![](/images/ico/ico5.png)
Electrical behaviour of fresh and stored porous silicon films
By Ciurea M.L. Baltog I. Lazar M. Iancu V. Lazanu S. Pentia E.
Thin Solid Films, Vol. 325, Iss. 1, 1998-07 ,pp. :