Optical and electrical properties of LPCVD silicon oxynitride films on silicon

Author: Szekeres A.   Alexandrova S.   Modreanu M.   Cosmin P.   Gartner M.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.61, Iss.2, 2001-05, pp. : 205-209

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Abstract