The effect of thermal annealing on the properties of thin alumina films prepared by low pressure metal-organic chemical vapour deposition

Author: Haanappel V.A.C.   Van der Vendel D.   Van Corbach H.D.   Fransen T.   Gellings P.J.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.256, Iss.1, 1995-02, pp. : 8-12

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract