Characteristics of zinc oxide thin films prepared by r.f. magnetron-mode electron cyclotron resonance sputtering

Author: Inukai T.   Matsuoka M.   Ono K.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.257, Iss.1, 1995-02, pp. : 22-27

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Abstract