The physical properties of Al-doped zinc oxide films prepared by RF magnetron sputtering [Thin solid films, 305 (1997) 201-209

Author： Kim K.H.   Park K.C.   Ma D.Y.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.320, Iss.2, 1998-05, pp. : 329-329

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The physical properties of Al-doped zinc oxide films prepared by RF magnetron sputtering

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