Atomic force microscopy and permeability study of stretching-induced gas barrier loss of AlO x layers

Author: Barker C.P.   Badyal J.P.S.   Kochem K.-H.   Kelly R.S.A.   Revell K.M.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.259, Iss.1, 1995-04, pp. : 46-52

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