Chemical stability of hydrogen-containing boron nitride films obtained by plasma enhanced chemical vapour deposition

Author： Akkerman Z.L. Kosinova M.L. Fainer N.I. Rumjantsev Y.F. Sysoeva N.P.

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.260, Iss.2, 1995-05, pp. : 156-160

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