Preparation of compositionally gradient Ti-TiN films by r.f. reactive sputtering

Author: Inoue S.   Ucihda H.   Takeshita K.   Koterazawa K.   Howson R.P.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.261, Iss.1, 1995-06, pp. : 115-119

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Abstract