Fabrication of titanium oxide thin films by controlled growth with sequential surface chemical reactions

Author: Kumagai H.   Toyoda K.   Matsumoto M.   Obara M.   Suzuki M.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.263, Iss.1, 1995-07, pp. : 47-53

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Abstract