High-resolution Auger depth profiling of multilayer structures Mo/Si, Mo/B 4 C, Ni/C

Author： Andreev S.S.   Akhsakhalyan A.D.   Drozdov M.N.   Polushkin N.I.   Salashchenko N.N.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.263, Iss.2, 1995-07, pp. : 169-174

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