Microstructure and residual stress of very thin Mo films

Author： Adams D.P.   Parfitt L.J.   Bilello J.C.   Yalisove S.M.   Rek Z.U.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.266, Iss.1, 1995-09, pp. : 52-57

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