Evolutions of residual stress and microstructure in ZrO 2 thin films deposited at different temperatures and rates

Author： Shao S.   Fan Z.   Shao J.   He H.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.445, Iss.1, 2003-11, pp. : 59-62

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