Selective area platinum silicide film deposition using a molecular precursor chemical beam source

Author: Hsu D.S.Y.   Turner N.H.   Troilo L.M.   Pierson K.W.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.269, Iss.1, 1995-11, pp. : 21-28

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Abstract