Crystallographic and electrical properties of platinum film grown by chemical vapor deposition using (methylcyclopentadienyl)trimethylplatinum

Author: Hiratani M.   Nabatame T.   Matsui Y.   Kimura S.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.410, Iss.1, 2002-05, pp. : 200-204

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