Electrical and optical properties of phosphorous nitride films formed on InP substrates with photon-assisted chemical vapour deposition

Author: Matsumoto Y.   Hanajiri T.   Sugano T.   Tuyen L.T.T.   Katoda T.   Tuyen L.T.T.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.269, Iss.1, 1995-11, pp. : 41-46

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