Author: Wang X. Martin P.J. Kinder T.J.
Publisher: Elsevier
ISSN: 0040-6090
Source: Thin Solid Films, Vol.256, Iss.1, 1995-02, pp. : 148-154
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
Properties of carbon nitride films deposited by magnetron sputtering
By Kusano Y. Evetts J.E. Somekh R.E. Hutchings I.M.
Thin Solid Films, Vol. 332, Iss. 1, 1998-11 ,pp. :