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Author: Wang X. Martin P.J. Kinder T.J.
Publisher: Elsevier
ISSN: 0040-6090
Source: Thin Solid Films, Vol.256, Iss.1, 1995-02, pp. : 148-154
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Properties of carbon nitride films deposited by magnetron sputtering
By Kusano Y. Evetts J.E. Somekh R.E. Hutchings I.M.
Thin Solid Films, Vol. 332, Iss. 1, 1998-11 ,pp. :