Optical study of ion-deposited diamond-like carbon films using spectroscopic ellipsometry

Author: Mori T.   Fujii N.   Xiong Y.-M.   Saitoh T.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.270, Iss.1, 1995-12, pp. : 215-219

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Abstract