Influences of optical emission settings on wear performance of metal-doped diamond-like carbon films deposited by unbalanced magnetron sputtering

Author： Wang D.-Y.   Chang C.-L.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.392, Iss.1, 2001-07, pp. : 11-15

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

INVESTIGATION ON ANTI-REFLECTION PROPERTY OF NITROGEN DOPED DIAMOND-LIKE CARBON (DLC) FILMS PRODUCED BY RF MAGNETRON SPUTTERING

By Vinod P.R.  

Molecular Crystals and Liquid Crystals Science and Technology. Section A. Molecular Crystals and Liquid Crystals, Vol. 386, Iss. 1, 2002-01 ,pp. : 61-66

Taylor & Francis Ltd

Access to resources Recommend Favorite

Characterization of doped diamond-like carbon films deposited by hot wire plasma sputtering of graphite

By Vasilets V.N.   Hirose A.   Yang Q.   Singh A.   Sammynaiken R.   Foursa M.   Shulga Y.M.  

Applied Physics A, Vol. 79, Iss. 8, 2004-12 ,pp. : 2079-2084

Springer Publishing Company

Access to resources Recommend Favorite

Optical properties of mixed phase a-C/diamond films deposited by dc magnetron sputtering of vitreous carbon target

By Kundu S.N.   Chattopadhyay K.K.   Basu M.   Maity A.B.   Chaudhuri S.   Pal A.K.  

Vacuum, Vol. 48, Iss. 5, 1997-05 ,pp. : 435-441

Elsevier

Access to resources Recommend Favorite

Characterization of diamond-like carbon (DLC) thin films prepared by r.f. magnetron sputtering

By Sanchez N.A.   Rincon C.   Zambrano G.   Galindo H.   Prieto P.  

Thin Solid Films, Vol. 373, Iss. 1, 2000-09 ,pp. : 247-250

Elsevier

Access to resources Recommend Favorite

Optical characterization of diamond-like carbon films

By Franta D.   Zajckova L.   Ohldal I.   Janca J.  

Vacuum, Vol. 61, Iss. 2, 2001-05 ,pp. : 279-283

Elsevier

Access to resources Recommend Favorite