Author： Meng W.J. Eesley G.L.
Publisher： Elsevier
ISSN： 0040-6090
Source： Thin Solid Films, Vol.271, Iss.1, 1995-12, pp. : 108-116
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
On the existence of superstructure in TiN x thin films
By Zerkout S. Achour S. Mosser A. Tabet N.
Thin Solid Films, Vol. 441, Iss. 1, 2003-09 ,pp. :
Access to resources
Recommend
Comparison of mechanical properties of TiN thin films using nanoindentation and bulge test
Thin Solid Films, Vol. 332, Iss. 1, 1998-11 ,pp. :
Room temperature oxidation behavior of TiN thin films
By Logothetidis S. Meletis E.I. Stergioudis G. Adjaottor A.A.
Thin Solid Films, Vol. 338, Iss. 1, 1999-01 ,pp. :
A modified method for arc deposition of Ti-N thin films
By Kourtev J. Pascova R. Weissmantel E.
Vacuum, Vol. 48, Iss. 1, 1997-01 ,pp. :