Room temperature oxidation behavior of TiN thin films

Author: Logothetidis S.   Meletis E.I.   Stergioudis G.   Adjaottor A.A.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.338, Iss.1, 1999-01, pp. : 304-313

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Abstract