Deposition of amorphous carbon layers from C 2 H 2 and CF 4 with an expanding thermal arc plasma beam set-up

Author： Gielen J.W.A.M. Schram D.C. Van de Sanden M.C.M.

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.271, Iss.1, 1995-12, pp. : 56-63

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