Elaboration and characterization of Ti and TiN thin films and Ti/TiN multilayers for hard coating applications

Author: Labdi S.   Houdy P.   Psyllaki P.   Jeandin M.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.275, Iss.1, 1996-04, pp. : 213-215

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Abstract