Time-dependent dielectric breakdown measurements on RPECVD and thermal oxides

Author: Silvestre V.   Hauser J.R.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.277, Iss.1, 1996-05, pp. : 101-114

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract