Dynamic actinometric optical emission spectroscopy for the elucidation of plasma processes in the production of fluorinated amorphous hydrogenated carbon films from glow discharges

Author： Durrant S.F.   Bica de Moraes M.A.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.277, Iss.1, 1996-05, pp. : 115-120

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