Author： Koh S.K. Yoon Y.S. Kim K.H. Jung H.J. Lee J.Y.
Publisher： Elsevier
ISSN： 0040-6090
Source： Thin Solid Films, Vol.278, Iss.1, 1996-05, pp. : 45-48
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
Cu films deposited by a partially ionized beam (PIB)
By Koh S.-K. Choi W.-K. Kim K.-H. Jung H.-J.
Thin Solid Films, Vol. 287, Iss. 1, 1996-10 ,pp. :
Access to resources
Recommend
Nozzle diameter effects on CuInSe 2 films grown by ionized cluster beam deposition
Thin Solid Films, Vol. 326, Iss. 1, 1998-08 ,pp. :
By Kaiya K. Omichi K. Takahashi N. Nakamura T. Okamoto S. Yamamoto H.
Thin Solid Films, Vol. 409, Iss. 1, 2002-04 ,pp. :
Room-temperature deposition of a-SiC:H thin films by ion-assisted plasma-enhanced CVD
Thin Solid Films, Vol. 283, Iss. 1, 1996-09 ,pp. :