Room-temperature deposition of indium tin oxide thin films with plasma ion-assisted evaporation

Author： Laux S.   Kaiser N.   Zoller A.   Gotzelmann R.   Lauth H.   Bernitzki H.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.335, Iss.1, 1998-11, pp. : 1-5

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