Metastable TiSi x N y O z films of B1-type structure prepared by the arc process

Author: Shalaeva E.V.   Kuznetsov M.V.   Borisov S.V.   Mitrofanov B.V.   Ivanovsky A.L.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.279, Iss.1, 1996-06, pp. : 75-81

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Abstract