Effects of substrate temperature on the structure and properties of reactive pulsed laser deposited CN x films

Author： Zhao X.-A.   Ong C.W.   Tsang Y.C.   Choy C.L.   Chan P.W.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.280, Iss.1, 1996-07, pp. : 1-4

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