Effects of heat treatment on structure of amorphous CN x thin films by pulsed laser deposition

Author: Aoi Y.   Ono K.   Sakurada K.   Kamijo E.   Sasaki M.   Sakayama K.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.389, Iss.1, 2001-06, pp. : 62-67

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Abstract