X-ray stress measurement for TiN films evaporated by PVD

By Ejiri S.   Hirose Y.   Sasaki T.  

Thin Solid Films, Vol. 307, Iss. 1, 1997-10 ,pp. : 178-182

Elsevier

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The structure of TiN films deposited by arc ion plating

By Matsue T.   Hanabusa T.   Ikeuchi Y.  

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A modified method for arc deposition of Ti-N thin films

By Kourtev J.   Pascova R.   Weissmantel E.  

Vacuum, Vol. 48, Iss. 1, 1997-01 ,pp. : 7-12

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Effect of process parameter changes on the composition of magnetron sputtered and evaporated TiN and AlN films measured by UHV in-situ techniques

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Thin Solid Films, Vol. 270, Iss. 1, 1995-12 ,pp. : 320-324

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Influence of chromium content on the dry machining performance of cathodic arc evaporated TiAlN coatings

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