Structures and properties of copper thin films prepared by ion beam assisted deposition

Author: Gotoh Y.   Yoshii H.   Amioka T.   Kameyama K.   Tsuji H.   Ishikawa J.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.288, Iss.1, 1996-11, pp. : 300-308

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Abstract