Influence of oxygen on the morphological and structural properties of Ti thin films grown by ion beam-assisted deposition

Author： Lopez J.M. Gordillo-Vazquez F.J. Fernandez M. Albella J.M.

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.384, Iss.1, 2001-03, pp. : 69-75

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