Gold metallization for aluminum nitride

Author: Shalish I.   Gasser S.M.   Kolawa E.   Nicolet M.-A.   Ruiz R.P.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.289, Iss.1, 1996-11, pp. : 166-169

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Abstract