Analysis of AlN thin films by combining TOF-ERDA and NRB techniques

Author: Jokinen J.   Haussalo P.   Keinonen J.   Riihela D.   Leskela M.   Ritala M.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.289, Iss.1, 1996-11, pp. : 159-165

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Abstract