The microstructure and properties of a buried AlN layer produced by nitrogen implantation into pure aluminum

Author： Lu H.L.   Sommer W.F.   Borden M.J.   Tesmer J.R.   Wu X.D.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.289, Iss.1, 1996-11, pp. : 17-21

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