Growth processes of dielectric thin films in a multipolar microwave plasma excited by distributed electron cyclotron resonance using tetraethylorthosilicate (TEOS) and oxygen precursors

Author： Delsol R.   Raynaud P.   Segui Y.   Latreche M.   Agres L.   Mage L.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.289, Iss.1, 1996-11, pp. : 170-176

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