Formation of a crystalline metal-rich silicide in thin film titanium/silicon reactions

Author: Clevenger L.A.   Cabral C.J.   Roy R.A.   Lavoie C.   Jordan-Sweet J.   Brauer S.   Stephenson G.B.   Morales G.   Ludwig K.F.J.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.289, Iss.1, 1996-11, pp. : 220-226

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract