Al-Sm and Al-Dy alloy thin films with low resistivity and high thermal stability for microelectronic conductor lines

Author: Takayama S.   Tsutsui N.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.289, Iss.1, 1996-11, pp. : 289-294

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Abstract