Microstructure of thermal hillocks on blanket Al thin films

Author: Kim D.-k.   Heiland B.   Nix W.D.   Arzt E.   Deal M.D.   Plummer J.D.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.371, Iss.1, 2000-08, pp. : 278-282

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