Surface orientation and structure of ion beam processed TiN films

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.295, Iss.1, 1997-02, pp. : 1-4

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

The structure of TiN films deposited by arc ion plating

By Matsue T. Hanabusa T. Ikeuchi Y.

Vacuum, Vol. 66, Iss. 3, 2002-08 ,pp. : 435-439

Elsevier

Access to resources Recommend Favorite

Ion beam-assisted deposition of DLC films on PMMA and TiN/PMMA

By Li D.J. Cui F.Z. Gu H.Q. Li W.Z.

Vacuum, Vol. 56, Iss. 3, 2000-03 ,pp. : 205-211

Elsevier

Access to resources Recommend Favorite

Structure of TIN x (0 < x < 1.1) films prepared by ion beam-assisted deposition

By Jiang H. Tao K. Li H.

Thin Solid Films, Vol. 258, Iss. 1, 1995-03 ,pp. : 51-55

Elsevier

Access to resources Recommend Favorite

X-ray reflectivity analysis of thin TiN and TiO x N y films deposited by dual-ion-beam sputtering on (100)Si substrates

By Alvisi M. Rizzo A. Tapfer L. Vasanelli L.

Thin Solid Films, Vol. 298, Iss. 1, 1997-04 ,pp. : 130-134

Elsevier

Access to resources Recommend Favorite

Oxidation behavior of TiN/AlN multilayer films prepared by ion beam-assisted deposition

By Kim D.-G. Seong T.-Y. Baik Y.-J.

Thin Solid Films, Vol. 397, Iss. 1, 2001-10 ,pp. : 203-207

Elsevier

Access to resources Recommend Favorite