Oxidation behavior of TiN/AlN multilayer films prepared by ion beam-assisted deposition

By Kim D.-G.   Seong T.-Y.   Baik Y.-J.  

Thin Solid Films, Vol. 397, Iss. 1, 2001-10 ,pp. : 203-207

Elsevier

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Photocurrent performance of TiO x films prepared by Ar + ion beam-assisted reactive deposition method

By Sasase M.   Takano I.   Isobe S.   Miyake K.  

Thin Solid Films, Vol. 269, Iss. 1, 1995-11 ,pp. : 36-40

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Influence of oxygen on the morphological and structural properties of Ti thin films grown by ion beam-assisted deposition

By Lopez J.M.   Gordillo-Vazquez F.J.   Fernandez M.   Albella J.M.  

Thin Solid Films, Vol. 384, Iss. 1, 2001-03 ,pp. : 69-75

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Stress generation during ion beam-assisted pulsed laser deposition of thin AlN films

By Six S.   Rauschenbach B.  

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Compositional characterization of CrN films deposited by ion beam-assisted deposition process on stainless steel

By Kumar S.   Raju V.S.   Shekhar R.   Arunachalam J.   Khanna A.S.   Prasad K.G.  

Thin Solid Films, Vol. 388, Iss. 1, 2001-06 ,pp. : 195-200

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